MICROELECTROMECHANICAL SYSTEMS WITH VO₂

• VO₂: a material for high-performance micro/nanoactuators Manca N, Pellegrino L, Kanki T, Venstra W, Mattoni G, Higuchi Y, Tanaka H, Caviglia A and Marré D Proceeding Actuators 2018, Bremen

• VO₂: A Phase Change Material for Micromechanics Manca N, Pellegrino L, Kanki T, Venstra W, Mattoni G, Higuchi Y, Tanaka H, Caviglia A and Marré D Proceedings 1 294 doi:10.3390/proceedings1040294 (2017)

• Selective High-Frequency Mechanical Actuation Driven by the VO₂ Electronic Instability Manca N, Pellegrino L, Kanki T, Venstra W J, Mattoni G, Higuchi Y, Tanaka H, Caviglia A D and Marré D Adv. Mater. 1701618 (2017)

• Influence of thermal boundary conditions on the current-driven resistive transition in VO₂ microbridges N. Manca, T. Kanki, H. Tanaka, D. Marré, and L. Pellegrino, Appl. Phys. Lett. 107, 143509 (2015)

• Metal–insulator transition in free-standing VO₂ /TiO₂ microstructures through low-power Joule heating S. Yamasaki, T. Kanki, N. Manca, L. Pellegrino, D. Marré, H. Tanaka, Appl. Phys. Express 7, 23201 (2014)

• Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials N. Manca, L. Pellegrino, T. Kanki, S. Yamasaki, H. Tanaka, A. S. Siri, D. Marré, Adv. Mater.  25, 6430–5 (2013)

• All-oxide microcantilevers: perspectives for device applications L. Pellegrino, N. Manca, T. Kanki, S. Yamasaki, H. Tanaka, M. Biasotti, R. Buzio, E. Bellingeri, V. Ceriale, A. S. Siri, D. Marré, in IEEE Proceeding 17th Int. Conf. Solid-State Sensors, Actuators Microsystems, pp. 988–991. (2013)

• Multistate Memory Devices  Based on Free-standing  VO₂/TiO₂ Microstructures Driven by Joule Self-Heating Luca Pellegrino, Nicola Manca, Teruo Kanki, Hidekazu Tanaka, Michele Biasotti, Emilio Bellingeri, Antonio Sergio Siri and Daniele Marré Adv. Mat. 24, 2929–2934 (2012).

NANOLITHOGRAPHY AND NANOCHANNEL STRUCTURES

• AFM Nanopatterning of Transition Metal Oxides Thin films L. Pellegrino, I. Pallecchi, E. Bellingeri, G. Canu, A. S. Siri, D. Marré, Y. Yanagisawa, M. Ishikawa, T. Matsumoto, H. Tanaka, T. Kawai , Journal of Nanoscience and Nanotechnology  10   Issue: 7 , 4471-4476 (2010)

• Nano Fabrication of Functional Transition Metal Oxide Thin Films Naoki Suzuki, Hidekazu Tanaka, Yoshihiko Yanagisawa, Satoru Yamanaka, Luca Pellegrino, Bong Kuk Lee, Hea Yeon Lee and Tomoji Kawai J. Vac. Soc. Jpn. Vol. 51, No. 1, (2008)

• Digitalized magnetoresistance observed in (La,Pr,Ca)MnO₃ nanochannel structures Yoshihiko Yanagisawa, Hidekazu Tanaka, Tomoji Kawai and Luca Pellegrino Appl. Phys. Lett. 89, 253121 (2006)

• (Fe,Mn)₃O₄ nanochannels fabricated by AFM local oxidation nanolithography using Mo/PMMA nanomasks Luca Pellegrino, Yoshihiko Yanagisawa, Mizue Ishikawa, Takuya Matsumoto, Hidekazu Tanaka and Tomoji Kawai, Adv. Mater., 18, 3099–3104 (2006)